Automatic Cleaning System
Automatic Cleaning System
製造商：DISCO
型號：DCS141
類別：WAFER & MASK SCRUBBERS
設備詳細訊息：
Applicable tape frame size: 2"-8"
Table rotating speed: 0-3000 min-1 (RPM)
Spinner discharge pressure: 2.0-12.0 (Mpa)
Air: 0.5 Mpa 216 L/min
N2: 0.5 Mpa 54 L/min
Water: 0.1 Mpa 0.1 L/min
Power: 100 V, Single phase, 1.5 KVa.