Nikon Stepper Step exposure machine

Product Number：NikonStepper

Model: Nikon i8、i9、i10、i11

Nikon stepper set up check items::

• Stage running test
• Wafer flatness test
• Chip leveling test
• Wafer pre-alignment test
• BST test
• Stepping test
• Reticle rotation test
• Lens distortion test
• Reticle blind test
• Overlay test
• IUC check adjust
• Checking laser power of LSA and interferometer
• Lamp power check / Lamp check

Load position adjust:

• Load arm transmission position check
• Wafer loader stage position check
• Pre-2 unit check and adjust
• O.F table check and adjustment
• Adjust wafer loading position
• Function of wafer flow and adjustment
• Check wafer loader repeatability