高壓汞燈

Application:

• Semiconductor
• Display(TFT,TP = touch Panel, OLED)
• LED
• MEMS(Bio Chips, NDA Chips, Micro-sensor, Micro-actuators)
• Passive components(mini-PR, capacitor, conductors)
• Solar Cell( GaAs)

Specification:
     >Exposure light source:

        350W, 500W, 1KW, 2kw, 5kw

      >Substrate size:

        2”~24”

      >Uniformity:

        > ± 3% and < ±5%

      >Alignment Accuracy:

         ± 1um