Desktop - Programmable Spin Coater (8 inch)

Product Number : AGS1008T

Desktop - Programmable Spin Coater (8 inch)

Equipment summary:

Applicable size: 6 "~ 8" Wafer substrates

Basic specifications:

• Dimension:530X600X450mm
• Exterior Material: PP welded plate combination, can acid erosion
• Operating cup cover: SUS system, round basin design
• Cup lid clamshell: Separate transparent PVC cover
• Sucker Specifications: a set of aluminum anode protection sucker precision grinding
• Operating modes: manual input directly
• Feeding: Manual feed
• Liquid Type: Photoresist, Solvents
• Motor: AC Servo Motor (speed: 10 ~ 6000 RPM)
• Including vacuum pump (PP dust cover attached)
• Vacuum exudate Protection: Yes, indirect protection design
• Vacuum detection: Yes (digital design vacuum value kpa limit protection)
• Protection: Yes
• Protection: All status of the unit, abnormal detection.
• Control system: - Software: PLC
• Vacuum gauge head: two sets window displays the setpoint and actual value
• Using the control panel: Chinese color touch panel
• Recipe Module: 100 group set formula
• Segment step sequence: each recipe step sequence modules are located. 30
• Control methods: 7-inch color touch Chinese HMI systems, with traditional and simplified Chinese, English user interface, and a spindle speed curve
• Power: Single phase 220V, 10A
• Annex 1 Operation Manual