Desktop - Programmable Spin Coater (6 inch)

Desktop - Programmable Spin Coater (6 inch)

Equipment:

Applicable Size: 2 "~ 6" Wafer substrates

Specifications:

• Demension:530X600Xmm
• Material: PP welded plate combination, can acid erosion.
• Cover: SUS system, round cup design
• Control Panel: Button
• Chuck: Hard coat surface
• Operation mode: Manual
• Loading: Manual.
• Liquid Type: Photoresist, Solvents
• Motor: AC Servo Motor (speed: 10 ~ 6000 RPM)
• Including vacuum pump (PP dust cover attached)
• Vacuum Exudate Protection: Yes, indirect protection design
• Vacuum Detection: Yes (digital design vacuum value kpa limit protection)
• Protection: Yes
• Protection: All status of the unit, detect abnormal processes
• Control system: - Software: PLC
• Vacuum Gauge: Two sets window display the set point and actual value
• Control panel: Color touch panel
• Recipe : 100 set.
• Step: One recipe can set 30 step
• Control Methods: 7-inch color touch Chinese HMI systems, with traditional and simplified Chinese, English user interface, and a spindle speed curve
• Power: Single phase 220V, 10A
• Annex 1 Operation Manual