高压汞灯
高压汞灯
Application:
- Semiconductor
- Display(TFT,TP = touch Panel, OLED)
- LED
- MEMS(Bio Chips, NDA Chips, Micro-sensor, Micro-actuators)
- Passive components(mini-PR, capacitor, conductors)
- Solar Cell( GaAs)
Specification:
>Exposure light source:
350W, 500W, 1KW, 2kw, 5kw
>Substrate size:
2”~24”
>Uniformity:
> ± 3% and < ±5%
>Alignment Accuracy:
± 1um